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Hardware MiTAP IE S500M (individual VOCs)- (optional based on Customer's need.)
MiTAP IE F8M (sub-ppb fast tVOC)- (optional based on Customer's need.)
2 ~ 32 sampling spots (vary from different fab design)
PC, MonitorUser Interface SCADA (Intouch, Ifix, Labview) Dimensions 90 x 90 x 180 cm Warranty 1 year Remark